Gilles Feugnet (Thales)
Shanhui Fan (Standford University)
Micro-Opto-Mechanical Pressure, Sound, and Ultrasound Sensors in Silicon-Nitride Photonic Technology
W. J. Westerveld, B. Figeys, H. Gao, C. H. Huang, F. Verhaegen, B. Troia, R. Haouari, P. Neutens,
J. O’Callaghan, S. Lenci, X. Rottenberg, R. Jansen, V. Rochus
Imec, Kapeldreef 75, 3001 Leuven, Belgium
e-mail: veronique.rochus@imec.be
ABSTRACT
Micro-electro-mechanical systems (MEMS) are used in applications ranging from consumer electronics to medical diagnostics. Alternatively, optical sensors offer low-noise, remote read-out via optical fiber, and are insensitive to electromagnetic interference. We demonstrate micro-opto-mechanical sensors (MOMS) in siliconnitride photonic technology. Experimental results and design trade-offs of pressure, sound, and ultrasound sensors are reported. Transparency for visible light offers prospective applications in life sciences, such as photo-acoustics.
Keywords: optical pressure sensor, optical microphone, ultrasound sensor, silicon photonics, silicon-nitride
Micro-Opto-Mechanical Pressure, Sound, and Ultrasound Sensors in Silicon-Nitride Photonic Technology
Boosting thermo-optic efficiency of silicon (oxy)nitride waveguides
Andrea Melloni1, Faisal Ahmed Memon2, Matteo Cantoni3, Marco Asa3 and Francesco Morichetti1
1DEIB – Politecnico di Milano, Milano, 20133 Italy
2Dept. Telecommunications Eng., Mehran University of Engineering & Technology Jamshoro, Pakistan
3Dip. Fisica – Politecnico di Milano, Milano, 20133 Italy
e-mail: andrea.melloni@polimi.it
ABSTRACT
Silicon OxyCarbide (SiOC) glass compound is introduced as a suitable material for integrated optical applications. SiOC is a low loss dielectric at telecom wavelength, has a wide refractive index tunability, can be integrated in most photonic platforms and possesses a unique high thermo-optic coefficient of 2.5×10-4 °C-1. Here we demonstrate that the thermal tuning efficiency of silicon nitride and silicon oxynitride devices is enhanced by about four times by integrating a high-refractive index coating of SiOC with a record thermo-optic coefficient.
Keywords: integrated photonics, thermo-optic effect, silicon oxycarbide, optical waveguides
Boosting thermo-optic efficiency of silicon (oxy)nitride waveguides