MEMS-based integrated photonic elements for ultra-low-power programmability

Programmability and reconfigurability provide exciting opportunities for integrated optics. In particular, the use of microelectromechanical tunable elements in silicon-based integrated photonics offers interesting options for scalable programmable photonics. In this invited talk, we will discuss our recent progress in developing compact, low-power, reconfigurable MEMS-based building blocks, namely tunable directional couplers and phase shifters, for a number of applications in photonic signal processing, computing, and communication.

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